Black border laser annealing SOL300 is a black border laser annealing system, which reduces the reflectivity of EUV
masks by forming a “black” border around the die pattern area.
In contrast to traditional etching technique, black border laser annealing reduces particles,
improves mask quality as well as reduces the total cost of ownership.
- Mini environment enclosure
- IR wavelength fiber laser
Optimized laser beam for (fine processing of) EUV mask
- Beam uniformity : < 5%
- Beam shape : Square or Rectangular
- Beam edge sharpness : < 5㎛
- Laser system optimized for EUV mask with 4-axis precision stages
- Real-time beam monitoring and interlock
- Optimal configuration and user interface for EUV mask production