ESOL

2020

Development of EUV Mask
and Pellicle related tools

• ESOL developed EUV microscope, EUV Phase measurement tool
  and EUV pellicle transmission/reflectance measurement tools
• ESOL is selected as a Start-up 100 company by Ministry
  of SMEs and Startups, Korea
• ESOL obtained certification of venture company

2019

Development of
EUV HHG Source

• ESOL developed EUV annealing tools and EUV HHG source
• ESOL opened ESOL R&D center at Dongtan
• ESOL moved to new Dongtan Fab

2018

Company Establishment

• ESOL (EUV Solutions) was founded in January 2018,
  in Dongtan, Gyeonggi-Do, Korea.